Porous Ceramic Vacuum Chuck Table
Porous ceramic vacuum chuck table supplied to semiconductor industry for silicon wafer dicing or finishing purposes.
It is an uniform compact frame, high strength, good porosity, durable absorption, vision inspection, excellent quality with high efficiency, no pollution and high fixing precision.
Emitech Resources is one of the few in manufacturing porous ceramic vacuum chuck table for the industries.
The available sizes measuring in diameter are including 6 inches, 8 inches, 12 inches and customize design or sizes with high parallelism and flatness.
The Porous Ceramic Vacuum Chuck Table normally made of porous ceramic. After continuously use of the vacuum chuck table, it will turned damage, burst or poor of vacuum efficiency. We are able to provide solutions.
Specification
| Property | Unit | Condition |
|---|---|---|
| Alumina Al₂O₃ | % | ≥80 |
| Acidity Resistance | mg/cm²≤ | 10.0 |
| Alkaline Resistance | mg/cm²≤ | 20.0 |
| Average Porousity Size | μm | 30 |
| Bulk Density | g/cm³ | 2.3-2.5 |
| Compressive Strength | MPa≥ | 600 |
| Flexural Strength | MPa≥ | 40 |
| Hardness | HRa | 50 |
| Open Pore Rate | % | 39 |
| Water Absorption | % | 17 |
Have a question or would like to make an enquiry? for more information CONTACT US NOW
The Solutions We Provide
Fabricate new porous ceramic vacuum chuck table for Disco, K&S Saws or other sawing machines.
Refurbish worn out porous ceramic vacuum chuck table with new layer of porous ceramic.
For the porous ceramic vacuum chuck table refurbish service, the chuck table will return to OEM specifications.
3mm of thickness for the porous ceramic layer.
Cost saving if compared with OEM Parts.
Shipment to domestic and overseas.